蚀刻剂/金属的匹配性表
蚀刻剂/金属的匹配性表
|
|
Al
|
Au
|
Cr
|
Cu
|
Ni
|
Si
|
Si3N4
|
SiO2
|
Ti
|
W
|
GaAs
|
Ta/TaN
|
|
铝A
|
Etch
|
Ok
|
Etch
|
Etch
|
Etch
|
Surf ox
|
Slight
|
Ok
|
Ok
|
Ok
|
Etch
|
Surf ox
|
|
铝D
|
Etch
|
Ok
|
Slight
|
Ok
|
Ok
|
Ok
|
Slight
|
Ok
|
Ok
|
Ok
|
Ok
|
Ok
|
|
铬蚀刻剂1020
|
Etch
|
Ok
|
Etch
|
Etch
|
Etch
|
Surf ox
|
Ok
|
Ok
|
Ok
|
Ok
|
Etch
|
Surf ox
|
|
铬蚀刻剂1020 CRE-473
|
Etch
|
Ok
|
Etch
|
Ok
|
Slight
|
Ok
|
Ok
|
Ok
|
Etch
|
Ok
|
Etch
|
Ok
|
|
铬蚀刻剂TFD
|
Etch
|
Ok
|
Etch
|
Etch
|
Etch
|
Surf ox
|
Ok
|
Ok
|
Ok
|
Ok
|
Etch
|
Surf ox
|
|
铜蚀刻剂100
|
Etch
|
Ok
|
Slight
|
Etch
|
Etch
|
Ok
|
Ok
|
Ok
|
Slight
|
Ok
|
Etch
|
Ok
|
|
铜蚀刻剂200
|
Etch
|
Ok
|
Slight
|
Etch
|
Etch
|
Ok
|
Ok
|
Ok
|
Slight
|
Ok
|
Etch
|
Ok
|
|
铜蚀刻剂APS-100
|
Ok
|
Ok
|
Ok
|
Etch
|
Slight
|
Ok
|
Ok
|
Ok
|
Ok
|
Ok
|
|
Ok
|
|
GE-8110
|
Etch
|
Etch
|
Ok
|
Corrode
|
Ok
|
Ok
|
Ok
|
Ok
|
Ok
|
Ok
|
Etch
|
Ok
|
|
GE-8111
|
Etch
|
Etch
|
Ok
|
Corrode
|
Ok
|
Ok
|
Slight
|
Ok
|
Ok
|
Ok
|
Etch
|
Ok
|
|
GE-8148
|
Etch
|
Etch
|
Ok
|
Corrode
|
Ok
|
Ok
|
Ok
|
Ok
|
Ok
|
Ok
|
Etch
|
Ok
|
|
金蚀刻剂TFA
|
Etch
|
Etch
|
Ok
|
Corrode
|
Slight
|
Ok
|
Ok
|
Ok
|
Ok
|
Ok
|
Etch
|
Ok
|
|
镍铬蚀刻剂TFC
|
Etch
|
Ok
|
Etch
|
Etch
|
Etch
|
Surf ox
|
Ok
|
Ok
|
Ok
|
Ok
|
Etch
|
Surf ox
|
|
镍铬蚀刻剂TFN
|
Etch
|
Ok
|
Etch
|
Etch
|
Etch
|
Surf ox
|
Ok
|
Ok
|
Ok
|
Ok
|
Etch
|
Surf ox
|
|
镍蚀刻剂TFB
|
Etch
|
Ok
|
Etch
|
Etch
|
Etch
|
Surf ox
|
Ok
|
Ok
|
Ok
|
Ok
|
Etch
|
Surf ox
|
|
镍蚀刻剂TFG
|
Etch
|
Ok
|
Ok
|
Ok
|
Etch
|
Ok
|
Ok
|
Ok
|
Ok
|
Ok
|
Ok
|
Ok
|
|
镍刻剂1型
|
Etch
|
Ok
|
Slight
|
Etch
|
Etch
|
Ok
|
Ok
|
Ok
|
Slight
|
Ok
|
Etch
|
Ok
|
|
银蚀刻剂TFS
|
Etch
|
Etch
|
Ok
|
Corrode
|
Slight
|
Ok
|
Ok
|
Ok
|
Ok
|
Ok
|
Etch
|
Ok
|
|
氮化钽蚀刻剂Ⅲ
|
Etch
|
Ok
|
Etch
|
Etch
|
Etch
|
Etch
|
Ok
|
Etch
|
Etch
|
Ok
|
Etch
|
Etch
|
|
氮化钽蚀刻剂SIE-8607
|
Etch
|
Ok
|
Etch
|
Etch
|
Etch
|
Etch
|
Ok
|
Etch
|
Etch
|
Ok
|
Etch
|
Etch
|
|
钛蚀刻剂TFT
|
Etch
|
Ok
|
Etch
|
Ok
|
Ok
|
Ok
|
Etch
|
Etch
|
Etch
|
Ok
|
Etch
|
Ok
|
|
钛蚀刻剂TFTN
|
Etch
|
Ok
|
Etch
|
Slight
|
Slight
|
Ok
|
Ok
|
Ok
|
Etch
|
Ok
|
Etch
|
Ok
|
|
钛-钨TIW-30
|
Ok
|
Ok
|
Ok
|
Ok
|
Slight
|
Ok
|
Ok
|
Ok
|
Ok
|
Ok
|
|
Ok
|
|
钨蚀刻剂TFW
|
Etch
|
Etch
|
Etch
|
Ok
|
Etch
|
Slight
|
Ok
|
Slight
|
Ok
|
Etch
|
Etch
|
Ok
|
注：Etch=显著蚀刻；Slight=轻微侵蚀；Ok=不侵蚀；Surf ox=表面氧化；Corrode=表面腐蚀
